High Efficiency Flexible Solar Cells For Consumer Electronics

ABSTRACT

A flexible solar cell comprises an epitaxially grown III-V layer having a first layer grown on a base substrate, at least one intermediate layer grown on the first layer, and a cap layer grown on the at least one intermediate layer, the III-V layer being separated from the base substrate by controllably spalling the first layer from the base substrate; and a flexible substrate coupled to the epitaxially grown III-V layer. The flexible solar cell may be used to provide power to an electronic device.

CROSS REFERENCE TO RELATED APPLICATIONS

This application claims the benefits of U.S. Provisional PatentApplication Ser. No. 61/604,248, filed Feb. 28, 2012, the contents ofwhich are incorporated herein by reference in their entirety.

BACKGROUND

The exemplary embodiments of this invention relate generally to solarcell technology and, more particularly, to the monolithic integration ofsolar cells into flexible substrates.

Solar cell technology involves the generation of electrical power byconverting solar radiation in the form of photon energy into directcurrent (DC) electricity. The conversion of solar radiation intoelectricity employs solar cells (also known as photovoltaic cells) thatcontain semiconductor materials. The solar cells are arranged andpackaged to form a solar panel, which can be used alone or inconjunction with other solar panels to define a system that generatesthe electricity.

One general concern in the operation of any solar cell system is themaximizing of conversion efficiency of the photon energy into electricalenergy under the constraint of minimum cost. The driving forces forinnovation in an effort to reduce costs in solar cell technology includeincreasing the efficiency of the solar cells, decreasing material costs,and/or decreasing processing costs. Additionally, efforts have been madeto incorporate basic solar panel systems into other materials to providefor a wider range of applications of solar cell technology.

One example of an effort to provide for a wider range of applications ofsolar cell technology involves the integration of solar panels withflexible materials to provide flexible structures. The resultingflexible structures can be incorporated into protective covers, holders,clothing, and the like. Current flexible solar cells, however, typicallyhave rather low efficiency (less than about 12%) and generally cannotproduce the required voltage needed for directly powering most consumerelectronic devices but are instead used to charge batteries.

BRIEF SUMMARY

In one exemplary embodiment, a structure comprises an epitaxially grownlayer of semiconductor material controllably spalled from a basesubstrate and a flexible substrate coupled to the epitaxially grownlayer of semiconductor material.

In another exemplary embodiment, a structure comprises an epitaxiallygrown III-V layer comprising a first sub cell grown on a base substrate,at least one intermediate sub cell grown on the first layer, and a finalsub cell grown on the at least one intermediate layer, the III-V layersbeing separated from the base substrate by controllably spalling thefirst layer from the base substrate. A flexible substrate is coupled tothe epitaxially grown III-V layers.

In another exemplary embodiment, a method comprises providing a basesubstrate having a surface; disposing layers of III-V semiconductormaterial on the surface of the base substrate using a chemical vapordeposition technique or a molecular beam epitaxy technique; disposing astressor layer on the layer of III-V semiconductor material; operativelyassociating a flexible handle substrate with the stressor layer; andusing controlled spalling to separate the layer of III-V semiconductormaterial from the base substrate to expose a surface of the layer ofIII-V semiconductor material.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

The foregoing and other aspects of exemplary embodiments are made moreevident in the following Detailed Description, when read in conjunctionwith the attached Drawing Figures, wherein:

FIG. 1 is a side cross-sectional view of one embodiment of amonolithically integrated flexible solar cell, wherein the adjacentcells are connected in series;

FIG. 2 is a side cross-sectional view of a structure defined by layerson a base substrate in an exemplary method of fabricating the flexiblesolar cell of FIG. 1;

FIG. 3 is a side cross-sectional view of a stressor layer and a flexiblehandle layer on the layers of FIG. 2;

FIG. 4 is a side cross-sectional view of a controlled spalling processon the structure of FIG. 3;

FIG. 5 is a side cross-sectional view of layers removed from the basesubstrate after the spalling process of FIG. 4;

FIG. 6 is a side cross-sectional view of another embodiment of aflexible solar cell, wherein the adjacent cells are connected in series;

FIG. 7 is a side cross-sectional view of a structure defined by III-Vepitaxial layers on a base substrate in an exemplary method offabricating the flexible solar cell of FIG. 6;

FIG. 8 is a side cross-sectional view of a stressor layer and a flexiblesubstrate layer on the III-V epitaxial layers of FIG. 7;

FIG. 9 is a side cross-sectional view of a controlled spalling processon the structure of FIG. 7;

FIG. 10 is a side cross-sectional view of layers removed from the basesubstrate after the spalling process of FIG. 9;

FIG. 11 is a side cross-sectional view of a dielectric layer and asecond flexible handle substrate disposed on the layers removed from thebase substrate after the spalling process of FIG. 9;

FIG. 12 is a side cross-sectional view of the III-V layer, dielectriclayer, and second flexible handle substrate removed from the stressorlayer and flexible substrate layer;

FIG. 13 is a side cross-sectional view of an arrangement ofmonolithically integrated solar cells, wherein the adjacent solar cellsare connected in series; and

FIG. 14 is a top view of the arrangement of FIG. 13.

DETAILED DESCRIPTION

As used herein, the term “III-V” refers to inorganic crystallinecompound semiconductors having at least one Group III element and atleast one Group V element. Exemplary III-V compounds for use in thestructures and methods described herein include, but are not limited to,gallium phosphide (GaP), gallium arsenide (GaAs), gallium nitride (GaN),gallium arsenide phosphide (GaAsP), gallium indium arsenide antimonyphosphide (GaInAsSbP), aluminum gallium arsenide (AlGaAs), aluminumgallium indium arsenide (AlGaInAs), indium arsenide (InAs), indiumgallium phosphide (InGaP), indium gallium arsenide (InGaAs), indiumarsenide antimony phosphide (InAsSbP), indium gallium aluminum phosphide(InGaAlP) and combinations of the foregoing.

High efficiency flexible III-V based solar cells are formed byepitaxially growing III-V semiconductor materials as layers on basesubstrates, integrating the semiconductor material layers with aflexible material, and using controlled spalling to remove the III-Vsemiconductor material layers and the flexible material from the basesubstrates. Once the III-V semiconductor material layers (hereinafter“III-V layers”) are grown on the base substrates, the III-V layers maydefine upright or inverted single junction structures, multi-junctionstructures, or the like.

The use of controlled spalling allows for the kerf-free removal of theIII-V layers from the base substrates at room temperature. The removedIII-V layers are monolithically integrated with the flexible material todefine the flexible solar cells. These flexible solar cells are arrangedto provide power to a consumer electronic device. The integration andarrangement (e.g., the stacking and layout) of the solar cells can betailored to meet the requirements desired for a specified product.

As shown in FIG. 1, one exemplary embodiment of a structure comprisingsolar cells monolithically integrated with a flexible substrate isdesignated generally by the reference number 100 and is hereinafterreferred to as “structure 100.” Structure 100 comprises an epitaxiallygrown III-V layer 110, a semi-insulating layer 120 on the III-V layer110, a dielectric layer 130 on the semi-insulating layer 120, areflector layer 140 on the dielectric layer 130, a stressor layer 150 onthe reflector layer 140, and a flexible handle substrate 160 on thestressor layer 150. An electrical contact 170 is disposed in the III-Vlayer 110 for connection of a first of the solar cells of the structure100 to an adjacent solar cell in series fashion. Although thesemi-insulating layer 120, the dielectric layer 130, and the reflectorlayer 140 are shown and described throughout the description herein, itshould be understood that the semi-insulating layer 120, the dielectriclayer 130, and the reflector layer 140 are optional in any of thedescribed embodiments. The semi-insulating layer 120 or the dielectriclayer 130 or the combination thereof provides electrical isolationbetween the solar cells and an optional metal reflector 140 or the metalstressor 150 in the absence of a metal reflector 140.

The epitaxially grown III-V layer 110 comprises a plurality of layers(shown at least in FIGS. 2 and 3) such that each plurality of layersforms a solar cell having an anode side 162 and a cathode side 164.Tunnel junctions are formed between each sub cell of the plurality oflayers to connect the sub cells across the solar cell structure. A firstinsulator 172 and a second insulator 174 are disposed so as to inhibitshorting between the layers of each solar cell across the electricalcontact 170. In connecting the solar cells of the III-V layer 110 toother solar cells, the first insulator 172 and the second insulator 174are arranged such that the anode side 162 of a first solar cell isconnected to the cathode side 164 of a second solar cell or vice versa,wherein the cathode side of the first solar cell is connected to theanode side of the second solar cell.

As shown in FIGS. 2-5, one exemplary method of fabricating anintermediate structure for use in forming the structure 100 is shown. Asshown in FIG. 2, the III-V layer 110 is epitaxially grown on a basesubstrate 165, which may comprise one or more of silicon (Si), siliconcarbide (SiC), germanium (Ge), GaAs, GaN, indium phosphide (InP) orother III-V, and the like. In the exemplary embodiment shown, the basesubstrate 165 comprises Ge.

Still referring to FIG. 2, the III-V layer 110 is deposited on the basesubstrate 165 as different sub cells. In the III-V layer 110, thevarious sub cells are grown such that a band gap energy (E_(g))decreases with each successive sub cell grown. The first sub cell(designated by the reference number 112 and hereinafter referred to as“first sub cell 112”) is deposited directly on the base substrate 165.An intermediate sub cell 114 is grown on the first sub cell 112, and acap sub cell 116 is grown on the intermediate sub cell 114. Together,the first sub cell 112, the intermediate sub cell 114, and the cap cell116 define the III-V layer 110 as an inverted multi-junction solar cellstructure. Although only three sub cells are illustrated, it should beunderstood by one of ordinary skill in the art that any number of subcells can be employed to define the III-V layer 110. For example, onesub cell can be deposited to define a single junction invertedstructure, two sub cells can be deposited to define an inverted doublejunction structure, or two or more sub cells can be used to define aninverted multi-junction structure.

Each of the first sub cell 112, the intermediate sub cell 114, and thecap sub cell 116 (as well as other layers (not shown)) may be comprisedof binary, tertiary, or quaternary III-V compound semiconductor layers.For example, the absorber layer of the first sub cell 112 may be InGaP(tertiary), the absorber layer of the intermediate sub cell 114 may beGaAs (binary), and the absorber layer of the cap sub cell 116 may beInGaAs (tertiary). In such a configuration, the E_(g) decreases from thefirst sub cell 112 to the cap cell 116 (i.e. the E_(g) of InGaP is 1.9electron volts (eV) at 300 degrees Kelvin, the E_(g) of GaAs is 1.412eV, and the E_(g) of InGaAs is 0.354-1.41 eV).

The semi-insulating layer 120 is grown on the cap sub cell 116. Thesemi-insulating layer 120 may comprise an aluminum-rich epitaxial layersuch as AlGaAs, indium aluminum gallium phosphide (InAlGaP), or otherhigh band gap material. The AlGaAs or InAlGaP may be p-doped with carbonor zinc, or it may be n-doped with silicon or tellurium. In embodimentsin which the semi-insulating layer 120 is aluminum-rich, thesemi-insulating layer 120 is oxidized to form aluminum oxide (Al₂O₃).

The semi-insulating layer 120 may, as an alternative to comprising analuminum-rich epitaxial layer, be grown on the cap sub cell 116 as asemi-insulating epitaxial layer such as GaAs or AlGaAs doped with eitheror both of iron and chromium. Doping of GaAs or AlGaAs with iron and/orchromium imparts a semi-insulating quality to the semi-insulating layer120.

The semi-insulating layer 120, irrespective of whether such a layer isan aluminum-rich epitaxial layer or a semi-insulating epitaxial layer,is deposited on the cap sub cell 116 at a temperature of about 200degrees C. to about 800 degrees C. to electrically isolate the stressorlayer 150 (and the reflector layer 140, if used) from the cap sub cell116 of the III-V layer 110.

The dielectric layer 130 is deposited on the semi-insulating layer 120via a chemical vapor deposition (CVD) technique, atomic layer depositiontechnique (ALD), or a physical vapor deposition (PVD) technique. Thedielectric layer 130 may comprise silicon dioxide (SiO₂), Al₂O₃, siliconnitrides (SiN_(x)), hafnium oxides, titanium oxides, as well as othermetal oxide dielectrics, or the like.

The reflector layer 140 (if used) is deposited on the dielectric layer130 via CVD, ALD, or PVD. The reflector layer 140 may comprise anysuitable metal that is capable of reflecting light received through theIII-V layer 110, the semi-insulating layer 120, and the dielectric layer130 back to the III-V layer 110.

Referring now to FIG. 3, the stressor layer 150 is deposited on thereflector layer 140 using PVD by sputtering or electroplating. Thethickness of the deposited stressor layer 150 is less than the thicknessat which spontaneous spalling would occur at room temperature (about 20degrees C.) but thick enough to permit mechanically-assisted spallingusing an external load (controlled spalling). Preferably, the stressorlayer 150 is a metal, and more preferably tensile strained nickeldeposited to a thickness of about 1 micrometer (um) to about 50 um, orfrom about 3 um to about 30 um, or about 4 um to about 10 um. Thestressor layer 150 is not limited to comprising a single layer ofmaterial (e.g., nickel), however, as the stressor layer 150 may comprisemultiple layers of different materials.

To facilitate the controlled spalling, the flexible handle substrate 160is adhered to or otherwise operatively associated with an upper surfaceof the stressor layer 150. The flexible handle substrate 160 may beadhered to the upper surface of the stressor layer 150 using anadhesive. The flexible handle substrate 160 comprises a foil or a tapethat is flexible and has a minimum radius of curvature that is less thanabout 30 centimeters (cm). If the material of the flexible handlesubstrate 160 is too rigid, the controlled spalling process may becompromised. One exemplary material for use as the flexible handlesubstrate 160 comprises a polyimide.

As shown in FIG. 4, the controlled spalling process involvesmechanically-assisted removal of the layers between and inclusive of theflexible handle substrate 160 and the III-V layer 110 from the basesubstrate 165. A fracture plane 190 (for example an engineered cleaveplane) may be inserted at an interface of the III-V layer 110 and thebase substrate 165. By creating the fracture plane 190, the controlledspalling occurs substantially along the boundary between the III-V layer110 and the base substrate 165. This results in a well-defined thicknessof the III-V layer 110 and smoother fractured surfaces. Examples offracture planes 190 include buried strained epitaxial layers that areweakened with hydrogen exposure, ion-implanted regions, and depositedlayer interfaces.

The controlled spalling process is not limited to the use of a fractureplane 190, in which the fracture depth is engineered to be at or belowthe interface of the III-V layer 110 and the base substrate 165 byadjusting the intrinsic properties of the stressor layer to satisfy theconditions for spalling mode fracture. The residual layer from the basesubstrate 165 and/or buffer layers grown prior to the growth of thefirst sub cell are removed after spalling.

To separate the III-V layer 110 from the base substrate 165 inembodiments incorporating a fracture plane 190, an upward force isapplied to an edge portion 162 of the flexible handle substrate 160 inthe direction indicated by arrow 300. In doing so, a separation occursat the fracture plane 190 between the III-V layer 110 and the basesubstrate 165, thereby allowing the III-V layer 110 to be lifted awayfrom and removed from the base substrate 165. The separation may notoccur exclusively at the fracture plane 190, as portions of the basesubstrate 165 may also be incidentally removed.

As shown in FIG. 5, once the controlled spalling process is carried outand the excess layers are removed, a surface 115 of the first sub cell112 of the III-V layer 110 is exposed. Trenches are formed in the III-Vlayer 110 to isolate portions of the III-V layer 110 into solar cells.The first insulators 172 and second insulators 174 are disposed in thetrenches, and the electrical contacts 170 are disposed between the firstinsulators 172 and the second insulators 174 (FIG. 1) to monolithicallyintegrate the solar cells to form the structure 100.

As shown in FIG. 6, another exemplary embodiment of the monolithicintegration of solar cells into a flexible structure is designatedgenerally by the reference number 200 and is hereinafter referred to as“structure 200.” Structure 200 comprises an epitaxially grown III-Vlayer 210, a dielectric layer 230 on the III-V layer 210, and a secondflexible handle substrate 261 adhered to the dielectric layer 230. As inthe first embodiment, the dielectric layer 230 may comprise SiO₂, Al₂O₃,SiN_(x), or the like. An electrical contact 170 is disposed in the III-Vlayer 210 for connection of the cells of the structure 200 to othercells.

Referring now to FIGS. 7-12, an exemplary method of fabricating anintermediate structure for use in forming the structure 200 is shown. Asshown in FIG. 7, the III-V layer 210 is epitaxially grown, as describedabove, by depositing a first sub cell 212 on a base substrate 265,growing an intermediate sub cell 214 on the first sub cell 212, andgrowing a cap sub cell 216 on the intermediate sub cell 214. The firstsub cell 212, the intermediate sub cell 214, and the cap sub cell 216collectively define the III-V layer 210 having a triple junction. In theepitaxial growth of the III-V layer 210, the layers are grown such thatthe band gap energy (E_(g)) increases with each successively grownlayer. As with previously-described embodiments, the III-V layer 210 isnot limited to three sub cells to define a triple junction structure, asany number of sub cells may be employed (e.g., one sub cell can beemployed to define a single junction, two sub cells can be employed todefine a double junction, or two or more sub cells can be employed todefine a multi-junction).

In one embodiment, the first sub cell of the III-V layer 210 may not bemade of III-V layers and is formed in the top portion of the basesubstrate 265 or grown on the base substrate 265, wherein the first subcell may be silicon, germanium, GeSb, GeC, SiC, or a combinationthereof.

As shown in FIG. 8, a stressor layer 250 is deposited directly on thecap sub cell 216 using PVD by sputtering or electroplating at about roomtemperature to a thickness below that which would result in thespontaneous spalling of the base substrate 265. Preferably, the stressorlayer 250 is a metal, and more preferably tensile strained nickeldeposited to a thickness of about 1 um to about 50 um, or from about 3um to about 30 um, or about 4 um to about 10 um. The stressor layer 250is not limited to comprising a single layer of material (e.g., nickel),however, as the stressor layer 250 may comprise multiple layers ofdifferent materials.

In a manner similar to that of the previous embodiment, to facilitatethe controlled spalling, the flexible handle substrate 260 comprises afoil or a tape (e.g., a polyimide) adhered to an upper surface of thestressor layer 250 using an adhesive.

As shown in FIG. 9, a fracture plane 290 is created at below theinterface between the first sub cell 212 and the base substrate 265. Inthe controlled spalling process, an upward force (indicated by arrow300) is applied to the edge portion 262 of the flexible handle substrate260, and the flexible handle substrate 260 is used to lift away andmechanically remove the stressor layer 250 and the III-V layer 210 fromthe base substrate 265.

As shown in FIG. 10, once the controlled spalling process is carriedout, a surface of the III-V layer 210 (more particularly, a surface 215of the first layer 212) is exposed. As shown in FIG. 11, the dielectriclayer 230 (e.g., SiO₂, Al₂O₃, SiN_(x), or the like) is deposited on thefirst layer 212 via CVD or PVD. A second flexible handle substrate 261(e.g., polyimide) is adhered to or otherwise coupled to an upper surfaceof the dielectric layer 230 using an adhesive.

As shown in FIG. 12, the flexible handle substrate 260 and the stressorlayer 250 are removed from the cap layer 216. The flexible handlesubstrate 260 is removed from the stressor layer 250 using either achemical or a physical technique. Chemical techniques include, but arenot limited to, the application of a solvent (e.g., acetone) to dissolvethe bond between the flexible handle substrate 260 and the stressorlayer 250. Physical techniques include, but are not limited to, the useof UV degradation or laser cutting. The use of either technique leavesthe stressor layer 250 exposed.

The stressor layer 250 is then removed from the cap layer 216 (thetop-most layer of the solar cell) using a dry or wet etch technique thatis selective to the cap layer 216. The resulting structure comprises theIII-V layer 210 disposed on the dielectric layer 230, to which thesecond flexible handle substrate 261 is adhered, thereby defining aninverted structure.

As shown in FIGS. 13 and 14, one exemplary embodiment of the monolithicintegration of a plurality of either the structure 100 or the structure200 to form a system is designated generally by the reference number 400and is hereinafter referred to as “system 400.” The system 400 comprisesa plurality of monolithically integrated structures arranged in seriesto define a flexible arrangement of solar cells for any suitableapplication including, but not limited to, recharging batteries formobile electronic devices or directly powering mobile electronicdevices. In FIG. 13, the semi-insulating layers, dielectric layers,reflector layers, and stressor layers are not shown, and the 111-V layer110, 210 is shown being disposed directly on the flexible substrate 160,260.

As can be seen in FIG. 14, the structures 100, 200 each define anindividual solar cell, each solar cell being spaced apart and isolatedfrom adjacent solar cells and connected in series via the electricalcontacts 170. The electrical contacts 170 facilitate the connection of abottom portion of each solar cell (shown at 182 in FIGS. 13 and 14) witha top portion of an adjacent solar cell (shown at 184 in FIGS. 13 and14). This arrangement allows for the operation of the system 400 as aseries of diodes through which current flows through the solar cells inone direction. Power may be received from the structures 100, 200 via afirst output terminal 420 and a second output terminal 430. Because ofthe use of the III-V layer, the efficiency of the system 400 (and eachstructure 100, 200 individually) is greater than 20% under an air masscoefficient of 1.5 (AM1.5) at 1 sun (solar irradiance of 1,000watts/meter squared).

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the invention. Asused herein, the singular forms “a,” “an,” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises”and/or “comprising,” when used in this specification, specify thepresence of stated features, integers, steps, operations, elements,and/or components, but do not preclude the presence or addition of oneor more other features, integers, steps, operations, elements,components, and/or groups thereof.

The description of the present invention has been presented for purposesof illustration and description, but is not intended to be exhaustive orlimited to the invention in the form disclosed. Many modifications andvariations will be apparent to those of ordinary skill in the artwithout departing from the scope and spirit of the invention. Theembodiments were chosen and described in order to best explain theprinciples of the invention and the practical applications, and toenable others of ordinary skill in the art to understand the inventionfor various embodiments with various modifications as are suited to theparticular uses contemplated.

1. A structure, comprising: an epitaxially grown layer of semiconductormaterial controllably spalled from a base substrate; and a flexiblesubstrate coupled to the epitaxially grown layer of semiconductormaterial.
 2. The structure of claim 1, wherein the epitaxially grownlayer of semiconductor material is an III-V layer comprising a first subcell, an intermediate sub cell on the first sub cell, and a cap sub cellon the intermediate sub cell.
 3. The structure of claim 2, wherein theepitaxially grown layer of semiconductor material defines an invertedsolar cell structure having one or more junctions.
 4. The structure ofclaim 2, wherein the epitaxially grown layer of semiconductor materialdefines an inverted metamorphic structure having one or more junctions.5. The structure of claim 1, further comprising a dielectric layerdisposed between the epitaxially grown layer of semiconductor materialand the flexible substrate.
 6. The structure of claim 5, furthercomprising one or more of a semi-insulating layer and a reflector layerdisposed between the epitaxially grown layer of semiconductor materialand the dielectric layer.
 7. The structure of claim 5, furthercomprising a stressor layer disposed between the dielectric layer andthe flexible substrate.
 8. A structure, comprising: an epitaxially grownIII-V layer comprising a first sub cell grown on a base substrate, atleast one intermediate sub cell grown on the first sub cell, and a capsub cell grown on the at least one intermediate sub cell, the III-Vlayer being separated from the base substrate by controllably spalling;and a flexible substrate coupled to the epitaxially grown III-V layer.9. The structure of claim 8, wherein a band gap energy of theepitaxially grown layer decreases from the first sub cell to the cap subcell.
 10. The flexible solar cell of claim 8, wherein a band gap energyof the epitaxially grown layer increases from the first layer to the caplayer.
 11. The structure of claim 8, further comprising a dielectriclayer disposed between the epitaxially grown III-V layer and theflexible substrate.
 12. The structure of claim 11, wherein thedielectric layer is selected from the group consisting of SiO₂, Al₂O₃,and SiN_(x).
 13. The structure of claim 11, further comprising asemi-insulating layer disposed between the epitaxially grown III-V layerand the dielectric layer.
 14. The structure of claim 13, wherein thesemi-insulating layer is aluminum-rich.
 15. The structure of claim 14,wherein the aluminum-rich semi-insulating layer is an epitaxial layercomprising AlGaAs or InAlGaP.
 16. The structure of claim 15, wherein theAlGaAs or the InAlGaP is unintentionally or intentionally doped with atleast one of carbon and zinc or at least one of silicon and tellurium.17. The structure of claim 14, wherein the semi-insulating layer isoxidized to form Al₂O₃.
 18. The structure of claim 13, wherein thesemi-insulating layer comprises GaAs or AlGaAs doped with either or bothof iron and chromium.
 19. The structure of claim 8, further comprising areflector layer disposed between the epitaxially grown III-V layer andthe flexible substrate.
 20. The structure of claim 11, furthercomprising a stressor layer disposed between the dielectric layer andthe flexible substrate.
 21. The structure of claim 20, wherein thestressor layer comprises single or multiple metal layers.
 22. Thestructure of claim 21, wherein the metal stack has tensile stress. 23.The structure of claim 8, wherein the flexible substrate comprises apolyimide.
 24. The structure of claim 8, wherein the base substratecomprises silicon, SiC, germanium, GaAs, GaN, or InP.
 25. The structureof claim 8, wherein the epitaxially grown III-V layer defines one of anupright solar cell and an inverted solar cell.